aChang Jung Christian University, Kway Jen, Tainan 711, Taiwan
bNational Cheng Kung University, Department of Mechanical Engineering, Tainan 701, Taiwan
cChienkuo Technology University, Institute of Mechatronoptic System, Changhua 500, Taiwan
Available online 14 October 2009.
Abstract
Combining sputtering technology using an industrial-scale four-target DC closed-field unbalanced magnetron sputtering ion plating system (CFUBMSIPS™) with post heat treatment, a graded multilayer TiN/W coating, consisting of five layers, was synthesized and its outmost W layer was transformed to lubricious WO3 successfully. The coatings were characterized by using GDOES, GXRD, a Rockwell C indentation tester, a nanoindentation tester, and a scratching tester. Wear behavior of coatings was evaluated by using a pin-on-disc tribometer. Through proper post heat treatment, the multilayer TiN/W coating, in spite of having a lower nano-hardness, showed good adhesion, much better wear performance and lower friction coefficient compared with the reference monolayer TiN coating.
Keywords: Graded multilayer TiN/W coating; Mechanical properties; Multilayer structure; Thin films; Wear
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